Sviluppo di materiali e dispositivi avanzati per la nanoelettronica (DFM.AD003.289)
Thematic area
Physical sciences and technologies of matter
Project area
Materiali innovativi (DFM.AD003)Structure responsible for the research project
Institute for microelectronics and microsystems (IMM)
Project manager
GRAZIELLA TALLARIDA
Phone number: 0396035977
Email: grazia.tallarida@mdm.imm.cnr.it
Abstract
The overall objective of the project is to provide European industry and manufacturing with urgently needed, trusted measurement capability and standards for 3D-resolved chemical composition and interfacial material properties.
"Faster", "smarter" and "cheaper" demands from consumers are driving innovation in high value-added manufacturing [1]. To achieve this, industry is increasingly using 3D architectures, additive manufacturing and a rapidly expanding library of materials. This is equally the case for devices based on organic materials, such as smart optical films and advanced coatings, as it is for inorganic nano-layered, high-density 3D-devices. In many technologies, e.g. sensors and semiconductors, the interface between organic and inorganic materials causes severe measurement issues. This creates an urgent need for beyond state-of-the-art capabilities to measure chemical composition and interfacial properties with 3D-spatial resolution.
Start date of activity
01/01/2019
Keywords
metrology, surface analysis, SIMS
Last update: 02/06/2023