Sviluppo di materiali e dispositivi avanzati per la nanoelettronica (DFM.AD003.289)
Physical sciences and technologies of matter
Project areaMateriali innovativi (DFM.AD003)
Structure responsible for the research project
Institute for microelectronics and microsystems (IMM)
Phone number: 0396035977
The overall objective of the project is to provide European industry and manufacturing with urgently needed, trusted measurement capability and standards for 3D-resolved chemical composition and interfacial material properties.
"Faster", "smarter" and "cheaper" demands from consumers are driving innovation in high value-added manufacturing . To achieve this, industry is increasingly using 3D architectures, additive manufacturing and a rapidly expanding library of materials. This is equally the case for devices based on organic materials, such as smart optical films and advanced coatings, as it is for inorganic nano-layered, high-density 3D-devices. In many technologies, e.g. sensors and semiconductors, the interface between organic and inorganic materials causes severe measurement issues. This creates an urgent need for beyond state-of-the-art capabilities to measure chemical composition and interfacial properties with 3D-spatial resolution.
Start date of activity
metrology, surface analysis, SIMS
Last update: 02/06/2023