SAMSUNG PRIORITY (DCM.AD006.299)
Area tematica
Scienze chimiche e tecnologie dei materiali
Area progettuale
Chimica e tecnologia dei materiali (DCM.AD006)Struttura responsabile del progetto di ricerca
Istituto di Scienze e Tecnologie Chimiche "Giulio Natta" (SCITEC)
Altre strutture che collaborano al progetto di ricerca
Responsabile di progetto
ALBERTO BOSSI
Telefono: 0250995627
E-mail: alberto.bossi@scitec.cnr.it
Abstract
High-tech devices require complex integrated circuits (IC) transistors. ICs are produced through the nanolithographic patterning of semiconductors. PRIORITY aims to prepare deep-UV active bio-photoacidresist and demonstrate the feasibility of shifting from current oil-based polymer resists to renewable and greener materials.
SCITEC is going to exploit the novel bio-polimers as prepared by the ISMN research group. Characterize chemically the new system and study their thin film arrangement onto surfaces. Photolithography (PL) and development kinetics are going to be studied. A home made PL apparatures will be realized
Data inizio attività
01/12/2020
Parole chiave
bio-photoresist, chitosan derivatives, DUV-lithography
Ultimo aggiornamento: 29/04/2024