SAMSUNG PRIORITY (DCM.AD006.299)
Thematic area
Chemical sciences and materials technology
Project area
Chimica e tecnologia dei materiali (DCM.AD006)Structure responsible for the research project
Istituto di Scienze e Tecnologie Chimiche "Giulio Natta" (SCITEC)
Other structures collaborating in the research project
Project manager
ALBERTO BOSSI
Phone number: 0250995627
Email: alberto.bossi@scitec.cnr.it
Abstract
High-tech devices require complex integrated circuits (IC) transistors. ICs are produced through the nanolithographic patterning of semiconductors. PRIORITY aims to prepare deep-UV active bio-photoacidresist and demonstrate the feasibility of shifting from current oil-based polymer resists to renewable and greener materials.
SCITEC is going to exploit the novel bio-polimers as prepared by the ISMN research group. Characterize chemically the new system and study their thin film arrangement onto surfaces. Photolithography (PL) and development kinetics are going to be studied. A home made PL apparatures will be realized
Start date of activity
01/12/2020
Keywords
bio-photoresist, chitosan derivatives, DUV-lithography
Last update: 07/06/2025