FEBIP 2018 7th International Workshop on Focused Electron Beam-Induced Processing
Dal 10/07/2018 ore 18.00 al 13/07/2018 ore 13.00
Complesso San Geminiano, Via San Geminiano 3, 41121 Modena, Italy
The scope of the workshop is to bring together the scientific community working with focused electron beams as a tool for direct nanofabrication, through gas-assisted deposition and etching. The scientific program will focus on the recent advances and applications of the technique, along with the fundamental aspects of electron-molecule interaction process and precursor design. Windows on focused ion beam sibling technique will be also opened.
The scientific program will be focused on the following topics:
- e-/molecule interaction process
- New gas precursors’ design
- Modeling of deposition&etching process
- Deposition&etching fundamentals: new materials and methods, purification, characterization
- FEBIP applications in Magnetism, Photonics and Electronics
- 3D FEBID: fundamentals & applications
- Focused Ion beam (Ga, He) deposition
The confirmed invited speakers are:
- Petra Swiderek (University of Bremen, Germany):
Recent Progress in Electron-Molecule Interaction Study - Michael Huth (Goethe University, Frankfurt, Germany):
FEBID meets Materials Science - Hans Mulders (ThermoFisher Scientific, The Netherlands):
Review on Deposit Purification Approaches - Paolo Vavassori (CIC NanoGune – San Sebastian, Spain):
Remote Magnetomechanical Nanoactuation by FEBID - Robert Winkler (FELMI ZFE – Graz, Austria):
Advanced 3D FEBID - Shinji Matsui (University of Hyogo, Japan):
Pioneer 3D Beam-Induced Deposition - Rosa Cordoba (ICMA – Zaragoza, Spain):
Ion Beam deposition of Superconductive Nanostructures - Jason Fowlkes (CNMS – Oak Ridge National Laboratory, USA):
Nanomechanical Characterization of 3D FEBID Nanostructures
Organizzato da:
Istituto Nanoscienze CNR Nano
Referente organizzativo:
Gian Carlo Gazzadi
CNR - Istituto Nanoscienze
via Campi 213/A 41125 Modena Italy
febip2018-modena@nano.cnr.it
Modalità di accesso: a pagamento
Please check http://web.nano.cnr.it/FEBIP2018-Modena/registration/ to download the registration form and check your rates
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