Materiali e processi per MEMS e dispositivi di potenza (DFM.AD001.371)
Thematic area
Physical sciences and technologies of matter
Project area
Sensori multifunzionali e dispositivi elettronici (DFM.AD001)Structure responsible for the research project
Institute for microelectronics and microsystems (IMM)
Project manager
CLAUDIA WIEMER
Phone number: 0396037624
Email: claudia.wiemer@mdm.imm.cnr.it
Abstract
Studio di materiali e processi per applicazioni in dispositivi MEMS e Smart Power
Goals
he objectives of this project are: i) the development and characterization by atomic layer deposition of dielectrics for optical mems; ii) the physic-chemical characterization of materials provided by ST-I for applications in Smart Power Devices
Start date of activity
01/02/2021
Keywords
MEMS, dispositivi di potenza, film sottili dielettrici
Last update: 07/06/2025