ETH-APS - Processing of 4H-SiC semiconductor wafers (DFM.AD001.324)
Thematic area
Physical sciences and technologies of matter
Project area
Sensori multifunzionali e dispositivi elettronici (DFM.AD001)Structure responsible for the research project
Institute of nanostructured materials (ISMN)
Other structures collaborating in the research project
Project manager
ROBERTA NIPOTI
Phone number: 0516399143
Email: NIPOTI@BO.IMM.CNR.IT
Abstract
Processing of 4H-SiC semiconductor wafers
Goals
X
Start date of activity
29/11/2018
Keywords
ETH, 4H, SIC
Last update: 31/05/2025