http://www.cnr.it/ontology/cnr/individuo/prodotto/ID48087
Structural characterization of nanocrystalline lanthanum oxyfluoride films obtained by Chemical Vapor Deposition (Articolo in rivista)
- Type
- Label
- Structural characterization of nanocrystalline lanthanum oxyfluoride films obtained by Chemical Vapor Deposition (Articolo in rivista) (literal)
- Anno
- 2007-01-01T00:00:00+01:00 (literal)
- Alternative label
D. Barreca, E. Bontempi, L.E. Depero, C. Maragno, E. Tondello, P. Zanola (2007)
Structural characterization of nanocrystalline lanthanum oxyfluoride films obtained by Chemical Vapor Deposition
in Journal of nanoscience and nanotechnology (Print)
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- D. Barreca, E. Bontempi, L.E. Depero, C. Maragno, E. Tondello, P. Zanola (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- 1: ISTM-CNR and INSTM, Department of Chemistry, University of Padova, Via Marzolo, 1-35131 Padova, Italy
2,3,6: INSTM and Chemistry for Technologies Laboratory, Brescia University, Via Branze, 38-25123 Brescia, Italy
4,5: Department of Chemistry, University of Padova and INSTM, Via Marzolo, 1-35131 Padova, Italy (literal)
- Titolo
- Structural characterization of nanocrystalline lanthanum oxyfluoride films obtained by Chemical Vapor Deposition (literal)
- Abstract
- This study is devoted to a thorough structural and microstructural characterization of nanophasic
LaOF-based thin films. The coatings were synthesized by Chemical Vapor Deposition (CVD) onto
Si(100) substrates at growth temperatures between 250 and 500 ?C, using La(hfa)3 ·diglyme (Hhfa=
1,1,1,5,5,5-hexafluoro-2,4-pentanedione; diglyme = bis(2-methoxyethyl)ether) as both La and F
molecular source under nitrogen+wet oxygen atmospheres. The system structure and microstructure
were investigated by Glancing Incidence X-ray Diffraction (GIXRD) and X-ray microdiffraction.
The most relevant sample features, with particular attention to the phase composition as a function
of the synthesis conditions, are critically discussed. (literal)
- Prodotto di
- Autore CNR
Incoming links:
- Prodotto
- Autore CNR di
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi