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Clustering of boron into a vicinal Si(100) surface: a quantum mechanical study at semiempirical level (Articolo in rivista)
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- Label
- Clustering of boron into a vicinal Si(100) surface: a quantum mechanical study at semiempirical level (Articolo in rivista) (literal)
- Anno
- 2002-01-01T00:00:00+01:00 (literal)
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- ISI Web of Science (WOS) (literal)
- Titolo
- Clustering of boron into a vicinal Si(100) surface: a quantum mechanical study at semiempirical level (literal)
- Abstract
- In this work the equilibrium configurations of boron impurities into a
silicon surface, vicinal to (100), are studied using the HartreeFock
method at semiempirical level. Clusters containing up to five boron atoms
are considered. These impurities are either of a substitutional or of an
interstitial type and are placed at the step edge. The most stable defect
shape is evaluated relaxing the system to an energy minimum with a steepest
descent approach. The results indicate that the impurities remain clustered
and are stabilized by the formation of bonds considerably shorter than the
normal interatomic distance in crystalline silicon. Due to the tensile
strain so generated, the step reconstructs strongly and the disorder
promotes the hybridization of the boronsilicon bonds. Owing to these
interactions, the binding energies of the clustered atoms acquire a
functional dependence on the step structure which seems in agreement with
experiments. (literal)
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