@prefix pubblicazioni: . @prefix unitaDiPersonaleInterno: . @prefix prodotto: . unitaDiPersonaleInterno:MATRICOLA39215 pubblicazioni:autoreCNRDi prodotto:ID86628 . @prefix prodottidellaricerca: . @prefix istituto: . istituto:CDS057 prodottidellaricerca:prodotto prodotto:ID86628 . @prefix modulo: . modulo:ID6192 prodottidellaricerca:prodotto prodotto:ID86628 . @prefix unitaDiPersonaleEsterno: . unitaDiPersonaleEsterno:ID10540 pubblicazioni:autoreCNRDi prodotto:ID86628 . unitaDiPersonaleEsterno:ID2577 pubblicazioni:autoreCNRDi prodotto:ID86628 . @prefix rdf: . @prefix retescientifica: . prodotto:ID86628 rdf:type retescientifica:ProdottoDellaRicerca , prodotto:TIPO1301 . @prefix rdfs: . prodotto:ID86628 rdfs:label "Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates (Contributo in atti di convegno)"@en . @prefix xsd: . prodotto:ID86628 pubblicazioni:anno "2007-01-01T00:00:00+01:00"^^xsd:gYear . @prefix skos: . prodotto:ID86628 skos:altLabel "
Buttiglione R, Dispenza M, Fiorello AM, Tuominen J, Kautio K, Ollila J, Jaakola T, R\u00F6nk\u00E4 K, Catoni S, Pochesci D, Marcelli R (2007)
Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates
in European Microelectronics and Packaging Conference and Exhibition of the International Microelectronic and Packaging Society, IMAPS-EMPC 2007, Oulu, Finland, June 17-20 2007
"^^rdf:HTML ; pubblicazioni:autori "Buttiglione R, Dispenza M, Fiorello AM, Tuominen J, Kautio K, Ollila J, Jaakola T, R\u00F6nk\u00E4 K, Catoni S, Pochesci D, Marcelli R"^^xsd:string ; pubblicazioni:titoloVolume "Procedings of the European Microelectronics and Packaging Conference and Exhibition of the International Microelectronic and Packaging Society, IMAPS-EMPC 2007"^^xsd:string ; pubblicazioni:note "Fabrication of high performance thin-film RF-MEMS structures directly on surface treated LTCC substrates has been investigated and demonstrated. After extensive testing of different LTCC materials as well as the characterization of lapping and polishing conditions, Heraeus CT707 was chosen as substrate material. The fabrication process for high performance thin film patterning and RF-MEMS structures has been developed, optimised and demonstrated. The release process for RF-MEMS structures has been optimised taking also into account the compatibility with LTCC materials. Also, hermetic sealing for the MEMS structures using brazing both with Kovar and ceramic lids has been designed, optimised and demonstrated."^^xsd:string ; skos:note "ISI Web of Science (WOS)"^^xsd:string ; pubblicazioni:affiliazioni "SELEX-SI, Roma\nVTT Oulu - Finland\nCNR-IMM Roma"^^xsd:string ; pubblicazioni:titolo "Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates"^^xsd:string ; pubblicazioni:isbn "978-952-99751-1-2"^^xsd:string ; pubblicazioni:autoriVolume "AA.VV."^^xsd:string ; prodottidellaricerca:abstract "Fabrication\u00A0of\u00A0high\u00A0performance\u00A0thin\u00ADfilm\u00A0RF\u00ADMEMS\u00A0structures\u00A0directly\u00A0on\u00A0surface\u00A0treated\u00A0LTCC\u00A0substrates\u00A0has\nbeen\u00A0 investigated\u00A0 and\u00A0 demonstrated.\u00A0 After\u00A0 extensive\u00A0 testing\u00A0 of\u00A0 different\u00A0 LTCC\u00A0 materials\u00A0 as\u00A0 well\u00A0 as\u00A0 the\ncharacterization\u00A0 of\u00A0 lapping\u00A0 and\u00A0 polishing\u00A0 conditions,\u00A0 Heraeus\u00A0 CT707\u00A0 was\u00A0 chosen\u00A0 as\u00A0 substrate\u00A0 material.\u00A0 The\nfabrication\u00A0 process\u00A0 for\u00A0 high\u00A0 performance\u00A0 thin\u00A0 film\u00A0 patterning\u00A0 and\u00A0 RF\u00ADMEMS\u00A0 structures\u00A0 has\u00A0 been\u00A0 developed,\noptimised\u00A0 and\u00A0 demonstrated.\u00A0 The\u00A0 release\u00A0process\u00A0for\u00A0RF\u00ADMEMS\u00A0 structures\u00A0 has\u00A0 been\u00A0 optimised\u00A0 taking\u00A0also\u00A0 into\naccount\u00A0 the\u00A0 compatibility\u00A0 with\u00A0 LTCC\u00A0 materials.\u00A0 Also,\u00A0 hermetic\u00A0 sealing\u00A0 for\u00A0 the\u00A0 MEMS\u00A0 structures\u00A0 using\u00A0 brazing\nboth\u00A0with\u00A0Kovar\u00A0and\u00A0ceramic\u00A0lids\u00A0has\u00A0been\u00A0designed,\u00A0optimised\u00A0and\u00A0demonstrated."@en . @prefix ns12: . prodotto:ID86628 pubblicazioni:editore ns12:ID14076 ; prodottidellaricerca:prodottoDi istituto:CDS057 , modulo:ID6192 ; pubblicazioni:autoreCNR unitaDiPersonaleEsterno:ID10540 , unitaDiPersonaleInterno:MATRICOLA39215 , unitaDiPersonaleEsterno:ID2577 . @prefix parolechiave: . prodotto:ID86628 parolechiave:insiemeDiParoleChiave . ns12:ID14076 pubblicazioni:editoreDi prodotto:ID86628 . parolechiave:insiemeDiParoleChiaveDi prodotto:ID86628 .